JPS6140133B2 - - Google Patents

Info

Publication number
JPS6140133B2
JPS6140133B2 JP52106588A JP10658877A JPS6140133B2 JP S6140133 B2 JPS6140133 B2 JP S6140133B2 JP 52106588 A JP52106588 A JP 52106588A JP 10658877 A JP10658877 A JP 10658877A JP S6140133 B2 JPS6140133 B2 JP S6140133B2
Authority
JP
Japan
Prior art keywords
polysilicon layer
insulating film
conductivity type
semiconductor
semiconductor region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52106588A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5440580A (en
Inventor
Makoto Takechi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10658877A priority Critical patent/JPS5440580A/ja
Publication of JPS5440580A publication Critical patent/JPS5440580A/ja
Publication of JPS6140133B2 publication Critical patent/JPS6140133B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP10658877A 1977-09-07 1977-09-07 Wiring contact structure of semiconductor device Granted JPS5440580A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10658877A JPS5440580A (en) 1977-09-07 1977-09-07 Wiring contact structure of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10658877A JPS5440580A (en) 1977-09-07 1977-09-07 Wiring contact structure of semiconductor device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP4912584A Division JPS59197153A (ja) 1984-03-16 1984-03-16 半導体装置の製法

Publications (2)

Publication Number Publication Date
JPS5440580A JPS5440580A (en) 1979-03-30
JPS6140133B2 true JPS6140133B2 (en]) 1986-09-08

Family

ID=14437342

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10658877A Granted JPS5440580A (en) 1977-09-07 1977-09-07 Wiring contact structure of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5440580A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5736844A (en) * 1980-08-15 1982-02-27 Hitachi Ltd Semiconductor device
JPH0821685B2 (ja) * 1988-02-26 1996-03-04 株式会社東芝 半導体メモリの製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3999213A (en) * 1972-04-14 1976-12-21 U.S. Philips Corporation Semiconductor device and method of manufacturing the device

Also Published As

Publication number Publication date
JPS5440580A (en) 1979-03-30

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